FinFET Devices for VLSI Circuits and Systems

FinFET Devices for VLSI Circuits and Systems

Saha, Samar K.

Taylor & Francis Ltd

01/2025

318

Mole

9780367515560

Pré-lançamento - envio 15 a 20 dias após a sua edição

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Chapter 1 Introduction...........................................................................................1

Chapter 2 Fundamentals of Semiconductor Physics............................................25

Chapter 3 Multiple-Gate Metal-Oxide-Semiconductor (MOS) System..............85

Chapter 4 Overview of FinFET Device Technology......................................... 133

Chapter 5 Large Geometry FinFET Device Operation..................................... 151

Chapter 7 Leakage Currents in FinFETs........................................................... 215

Chapter 8 Parasitic Elements in FinFETs.......................................................... 231

Chapter 9 Challenges to FinFET Process and Device Technology .................. 257

Chapter 10 FinFET Compact Models for Circuit Simulation..............................277

Index.......................................................................................................................309
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VLSI Circuit;MOS Capacitor;Physical Electronics;Drain Current Model;Capacitor Systems, Compact Modeling;Mathematical Expressions;Circuits;Subthreshold Swing;Microelectronics;Gate Oxide Thickness;Semiconductors;SDE;IC Fabrication;QM Effect;fin field-effect transistor devices;Inversion Charge Density;very large scale integrated circuits;Inversion Carriers;metal-oxide-semiconductor capacitor systems;Volume Inversion;integrated circuits fabrication technology;Drain End;Depletion Region;Inversion Charge;Leakage Current;Surface Potential Function;Silicon Fin;Inversion Layer;FinFET Devices;EUV Lithography;Oxide Spacers;Source Drain Spacer;Drain Current;Dopant Fluctuations;DIBL