Handbook of Thin Film Deposition

1. Introduction

Part I Reduction to Practice
2. Process Integration for On-Chip Interconnects
3. Sputter Processing
4. Epitaxial Thin Film Growth
5. CVD Processing and Processes
6. CMP: Scaling Down and Stacking Up: How the Trends in Semiconductors are Affecting Chemical-Mechanical Planarization
7. Limits of Gate Dielectric Scaling

Part II Applications and Limitations
8. Reliability Considerations for Thin Film Devices
9. Thin Film Development for LED Technologies
10. Emerging Ferroelectric Thin Films: Applications and Processing
11. Applications of Thin Film in Semiconductor Memories
12. Yield Issues and Defect Density in Thin Films

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• Engenharia mecânica
• Tecnologia dos revestimentos superficiais

Semiconductors; fabrication; nanotechnology; Moore's Law; microelectronics; front end; back end; thin films; optical thin films; material processing